Ultrahigh-Purity Valves for Atomic Layer Processing, ALD ...

Atomic Layer Deposition (ALD) Valves 1 ATOMIC LAER DEPOSITION Atomic Layer Deposition (ALD) Valves Ultrahigh cycle life with high-speed actuation C v range from 0.27 to 1.7 Full immersion capability up to 392°F (200°C) with thermal actuators Electronic or optical actuator position-sensing option Suitable for ultrahigh-purity applications with 316L VIM-VAR stainless …