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3 センサ 31 変位・速度・加速度

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1 . . xExeRRl= xeERlx SCd =CSd d CdCd = LC 12LC =22CdCd = = . 20nSLl = 0sxsLnSllx 2ssxlxl =+sx LxLx = . iB rotBit = 12oeee= 12,ee . dendt = xx = ndxexdt = enx 2.

2 3.1 変位・速度・加速度 レーザ変位センサ 三角測量を応用 レーザの光を測定対象物に照射し 対象物から拡散反射された光線の

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