Chapter 3 產生真空的辦法 第一節第一節真空幫浦真空幫浦

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Chapter 3 31 33 1 vacuum pump 2 positive displacement type (rotary pump and scroll pump) kinetic energy type (turbo-molecular pump) (diffusion pump) surface adsorption type pump sorption pump getter pump cryogenic pump cryo pump ion pump)3 ultimate pressure operational pressure range selectivity 4 mercu

利用空氣（或氣體）混抽法（Air ballast method）減低或消除蒸氣 靜子靠近排氣口側設有一氣體混抽 裝置 包含有一開關閥，一單向閥，及連