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Journal of Electron Spectroscopy and Related Phenomena 120 (2001) 149 / locate / elspecRapid communicationWork function measurements on indium tin oxide filmsa,bb*R. Schlaf, H. Murata , KafafiaCenter for Microelectronics Research,Department of Electrical Engineering,University of South Florida,Tampa,FL33620,USAbOptical Sciences Division,US Naval Research Laboratory,Washington,DC20375,USAReceive d 16 April 2001; received in revised form 15 May 2001; accepted 15 May 2001AbstractWe determined the work function of indium tin oxide (ITO) films on glass substrates using photoemission spectroscopy(PES). The ITO coated glass substrates were chemically cleaned ex-situ, oxygen plasma treated ex-situ, or sputtered results suggest that the performance of ultraviolet photoemission spectroscopy (UPS) measurements can induce asignificant work function reduction on the order of eV, on ex-situ chemically and oxygen-plasma treated ITOsamples.

Journal of Electron Spectroscopy and Related Phenomena 120 (2001) 149–154 www.elsevier.nl/locate/elspec Rapid communication Work function measurements on indium tin oxide films

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