Wafer Loader - techsansystem.co.kr

← Back to document page

AL110-8 Dimensions(unit : mm)AL110-6 Dimensions(unit : mm)( ) Combined with MX51Wafer LoaderSuper clean and fast Wafer transferSpecifications are subject to change without any obligation on the part of the versions200/150mm compatible versions100/125/150mm compatible versionsItemLLMLBMB LMBLLMLBMB LMBLLMLMBWafer diameters*1200mm orientation flat type, 200mm notch type__150mm orientation flat type_100mm, 125mm and 150mm orientation flat type_CassetteFluoroware, H-ber type_Number of cassetteOne_Inspection modesSequential and sampling_Transfer modesMicro inspection___________Top macro inspection___ _ ____Back macro inspection____ ___2nd back surface macro inspection____ ___Orientation flat/notchOne every 90.

AL110-8 Dimensions (unit : mm) AL110-6 Dimensions (unit : mm) ( ) Combined with MX51 Wafer Loader Super clean and fast wafer transfer Specifications are subject to change without any obligation on the part of the manufacturer.

  Loaders, Wafer, Wafer loader