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A NATIONAL MEASUREMENT GOOD PRACTICE …
A NATIONAL MEASUREMENT good PRACTICE guide for the MEASUREMENT of Smooth Surface Topography using Coherence Scanning InterferometryA NATIONAL MEASUREMENT good PRACTICE guide for the MEASUREMENT of Smooth Surface Topography using Coherence Scanning Interferometry MEASUREMENT good PRACTICE guide No. 108 guide to the MEASUREMENT of Smooth Surface Topography using Coherence Scanning Interferometry Richard Leach NATIONAL Physical Laboratory Leigh Brown, Xiangqian Jiang University of Huddersfield Roy Blunt IQE Ltd Mike Conroy, Darian Mauger Taylor Hobson Ltd ABSTRACT This guide describes good PRACTICE for the MEASUREMENT and characterisation of smooth surface topography using coherence scanning interferometry (commonly referred to as vertical scanning white light interferometry). The guide is based on the MEASUREMENT of the topography of semiconductors, epitaxial wafers and optical thin film coatings. However, the general guidelines described here can be applied to many flat, smooth surface topography measurements.
A NATIONAL MEASUREMENT GOOD PRACTICE GUIDE No.108 Guide for the Measurement of Smooth Surface Topography using Coherence Scanning Interferometry
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