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Advanced Process Control in Semiconductor …
Advanced Process Control in Semiconductor ManufacturingTom SondermanCostas SpanosOutline The Challenge Historical Perspective Measuring Variability The Importance of Metrology Controlling Variability Applied Concepts APC at AMD Modeling Variability Interaction of Design and Manufacturing Design for Controllability Future PerspectivesIntroduction Error budgets cannot keep up with shrinking dimensions. In the sub-100nm generations, Critical Dimensions (CDs) are hard to Control . 65nm features, have an error budget of +/- ~5nm.
Outline The Challenge • Historical Perspective • Measuring Variability – The Importance of Metrology • Controlling Variability – Applied Concepts – APC at AMD
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