aluminium etching - MicroChemicals

AluminiumEtchingRevised: 2013-11-07 , wafers, plating solutions, etchants and solvents ..Phone: +49 731 977343 0 chemicals concentrations mentioned in this chapter with a * refer to a conventional concen-tration listed in the last section of this has a density of g/cm3 and thereforebelongs to the light metals. Its crystal structure is cu-bic face to its high electric conductivity, aluminium is usedfor conductors in microelectronics where it is often al-loyed with copper in order to prevent electro migra-tion, or with silicon in order to prevent the formationof (silicon-consuming) aluminium -silicon a standard potential of V, aluminium doesnot belong to the noble metals. However, the forma-tion of a very thin (few nm) Al2O3 film makes it very inert in many substances. Therefore, Aletchants require at least compounds for dissolving Al2O3 as well as for etching (or, respectively,oxidizing) etching MechanismTypical aluminium etchants contain mixtures of 1-5 % HNO3* (for Al oxidation), 65-75 %H3PO4* (to dissolve the Al2O3), 5-10 % CH3 COOH* (for wetting and buffering) and H2O dilutionto define the etch rate at given etching is highly exothermic, an (inevitable, since i)

Aluminium Etching Revised: 2013-11-07 Source: www.microchemicals.com/downloads/application_notes.html Photoresists, wafers, plating solutions, etchants and solvents ...

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