Transcription of An Introduction to MEMS (Micro-electromechanical Systems)
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An Introduction to MEMS (Micro-electromechanical Systems)
Prime Faraday technology Watch ISBN 1-84402-020-7 An Introduction to MEMS January 2002 An Introduction to MEMS (Micro-electromechanical Systems) MEMS has been identified as one of the most promising technologies for the 21st Century and has the potential to revolutionize both industrial and consumer products by combining silicon-based microelectronics with micromachining technology . Its techniques and microsystem-based devices have the potential to dramatically affect of all of our lives and the way we live. This report presents a general Introduction to the field of MEMS, with emphasis on its commercial applications and device fabrication methods. It also describes the range of MEMS sensors and actuators, the phenomena that can be sensed or acted upon with MEMS devices, and outlines the major challenges facing the industry. PRIME Faraday Partnership PRIME Faraday Partnership This title is for sale in paperback at technology Watch titles are written for managers, especially in small and medium-sized manufacturing companies.
introduction to cutting-edge developments that affect – or likely soon will affect – the design, development, manufacture and marketing of ... Prime Faraday Technology Watch – January 2002 3 From a very early vision in the early 1950’s, MEMS has gradually made its way out of ... (optical and wireless), biomedical and process control areas.
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