Transcription of ATHENA User’s Manual
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ATHENA User’s Manual
SILVACO International4701 Patrick Henry Drive, Bldg. 1 July 20, 2005 Santa Clara, CA 95054 Version (408) 567-1000 FAX:(408) 496-6080E-MAIL: User s Manual 2D PROCESS SIMULATION SOFTWARESILVACO InternationaliiThe information contained in this document is subject to change without International MAKES NO WARRANTY OF ANY KIND WITH REGARD TO THIS MATERIAL, INCLUDING, BUT NOT LIMITED TO, THE IMPLIED WARRANTY OF FITNESS FOR A PARTICULAR PURPOSE. SILVACO International Inc. shall not be held liable for errors contained herein or for incidental or consequential damages in connection with the furnishing, performance, or use of this document contains proprietary information, which is protected by copyright laws of the United States.
SILVACO International 4701 Patrick Henry Drive, Bldg. 1 July 20, 2005 Santa Clara, CA 95054 Version 5.10.0.R Telephone (408) 567-1000 FAX: (408) 496-6080
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