Transcription of Auger Electron Spectroscopy (AES)
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Auger Electron Spectroscopy (AES)
Auger Electron Spectroscopy (AES) Prof. Paul K. ChuAuger Electron SpectroscopyIntroductionPrinciplesInstru mentationQualitative analysisQuantitative analysis Depth profilingMapping ExamplesTheAugerEffectisnamedafteritsdis coverer,PierreAuger, AugerTodayAugerelectronspectroscopyisapo werfulsurfaceanalyticaltooltoprobesurfac es,thinfilms, ( ),goodspatialsurfaceresolution(asgoodas1 0nm),periodictablecoverage(excepthydroge nandhelium),andreasonablesensitivity(100 ppmformostelements).Signals of Auger electronsDistribution of Energies of Emitted ElectronsAuger electronsElectron Beam -Sample InteractionPrimary Electron BeamAuger Electrons4-50 >Atomic No.
attached to a positive high voltage. The other end of the string goes to the electron multiplier case and ground. The dynode potentials differ in equal steps along the chain. When a particle (electron, ion, high energy neutral, or high energy photon) strikes the first dynode, it produces secondary electrons. The
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