Transcription of Basic 2Basic 2 Anisotropic Wet-etching of Silicon ...
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Basic 2Basic 2 Anisotropic Wet-etching of Silicon ...
Basic 2 Basic 2 Anisotropic Wet-etchingof Silicon : characterization and modeling of changeablemodeling of changeable AnisotropypyProf K SatoProf. K. SatoDept. of Micro/Nano Systems EngineeringNagoya UniversityBasic 2 Anisotropic Wet-etching of Silicon : Prof. K. SatoCharacterization and modeling of changeable AnisotropyCOE for Education and Research of Micro-Nano Mechatronics, Nagoya UniversityOrientation Dependent Etching(Conventional Products) 110 111 112 100 SiO2 111 100 SiO2 SiDiaphragmDeep grooves on a (110) waferDiaphragm on a (100) waferBasic 2 Anisotropic Wet-etching of Silicon : Prof.
Basic 2Basic 2 Anisotropic Wet-etching of Silicon: Characterization and Modeling of ChangeableModeling of Changeable Anisotropy Prof K SatoProf. K.
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