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Basic Wavefront Aberration Theory for Optical Metrology

APPLIED OPTICS AND Optical ENGINEERING, VOL. XlCHAPTER 1 Basic Wavefront Aberration Theoryfor Optical MetrologyJAMES C. WYANTO ptical Sciences Center, University of ArizonaandWYKO Corporation, Tucson, ArizonaKATHERINE CREATHO ptical Sciences CenterUniversity of Arizona, Tucson, ConventionsAberration-Free ImageSpherical Wavefront , Defocus, and Lateral ShiftAngular, Transverse, and Longitudinal AberrationSeidel AberrationsA. Spherical AberrationB. Coma C. Astigmatism D. Field Curvature E. Distortion zernike PolynomialsRelationship between zernike Polynomials and Third-OrderAberrationsPeak-to-Valley and RMS Wavefront AberrationStrehl RatioChromatic AberrationsAberrations Introduced by Plane Parallel PlatesAberrations of Simple Thin 48A.

Zernike polynomials have three properties that distinguish them from other sets of orthogonal polynomials. First, they have simple rotational symmetry properties that lead to a polynomial product of the form (49) where G (θ′ ) is a continuous function that …

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