Transcription of CHAPTER 10 AUGER ELECTRON SPECTROSCOPY
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CHAPTER 10 AUGER ELECTRON SPECTROSCOPY
CHAPTER 10 AUGER ELECTRON SPECTROSCOPY Richard P. Gunawardane and Christopher R. Arumainayagam Department of Chemistry, Wellesley College, Wellesley, MA 02481, INTRODUCTION AUGER ELECTRON SPECTROSCOPY (AES) is a nondestructive core-level ELECTRON SPECTROSCOPY for semi-quantitative determination of the elemental composition of surfaces, thin films, and interfaces. The popularity of this ultrahigh vacuum technique may be attributed to high surface sensitivity (an analysis depth of less than 100 ) and a relatively low detection limit (~ atomic percent). In addition to having an elemental coverage from lithium to uranium and beyond, AES has the ability to distinguish between two elements that are close to each other in the periodic table.
and is readily available from many different commercial sources. The reasons enumerated above explain why Auger electron spectroscopy has become perhaps the most widely used surface analytical technique. Recent developments in AES have expanded the scope of this technique beyond the probing of surface elemental composition. For example, spin
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