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CHAPTER 10 AUGER ELECTRON SPECTROSCOPY

CHAPTER 10 AUGER ELECTRON SPECTROSCOPY Richard P. Gunawardane and Christopher R. Arumainayagam Department of Chemistry, Wellesley College, Wellesley, MA 02481, INTRODUCTION AUGER ELECTRON SPECTROSCOPY (AES) is a nondestructive core-level ELECTRON SPECTROSCOPY for semi-quantitative determination of the elemental composition of surfaces, thin films, and interfaces. The popularity of this ultrahigh vacuum technique may be attributed to high surface sensitivity (an analysis depth of less than 100 ) and a relatively low detection limit (~ atomic percent).

AES chemical shifts and line shapes can also yield bonding (chemical state) information, albeit with less precision than is possible with X-ray photoelectron spectroscopy (XPS) (Chapter 11), another core-level electron spectroscopy. Auger electron spectroscopy has a …

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