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CHAPTER 10 AUGER ELECTRON SPECTROSCOPY - …

CHAPTER 10 AUGER ELECTRON SPECTROSCOPY Richard P. Gunawardane and Christopher R. Arumainayagam Department of Chemistry, Wellesley College, Wellesley, MA 02481, INTRODUCTION AUGER ELECTRON SPECTROSCOPY (AES) is a nondestructive core-level ELECTRON SPECTROSCOPY for semi-quantitative determination of the elemental composition of surfaces, thin films, and interfaces. The popularity of this ultrahigh vacuum technique may be attributed to high surface sensitivity (an analysis depth of less than 100 ) and a relatively low detection limit (~ atomic percent). In addition to having an elemental coverage from lithium to uranium and beyond, AES has the ability to distinguish between two elements that are close to each other in the periodic table.

Because Auger is a three-electron process, hydrogen and helium cannot be detected by this technique. Although Li has three electrons, an isolated ground state Li atom does not yield Auger peaks because the atom has only two energy levels that contain electrons. Auger peaks, however, have been detected from multiply excited Li atoms [7].

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