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CHAPTER 10 AUGER ELECTRON SPECTROSCOPY

CHAPTER 10 AUGER ELECTRON SPECTROSCOPY Richard P. Gunawardane and Christopher R. Arumainayagam Department of Chemistry, Wellesley College, Wellesley, MA 02481, INTRODUCTION AUGER ELECTRON SPECTROSCOPY (AES) is a nondestructive core-level ELECTRON SPECTROSCOPY for semi-quantitative determination of the elemental composition of surfaces, thin films, and interfaces. The popularity of this ultrahigh vacuum technique may be attributed to high surface sensitivity (an analysis depth of less than 100 ) and a relatively low detection limit (~ atomic percent).

consistent with Heisenberg’s uncertainty principle. The kinetic energies of the Auger electrons are characteristic of each emitting atom. Thus, the measurement of the kinetic energies of Auger electrons can be used to identify the elements present on the surface of the sample. Because the kinetic energies of Auger electrons depend on the

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