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CHAPTER 10 AUGER ELECTRON SPECTROSCOPY

CHAPTER 10 AUGER ELECTRON SPECTROSCOPY Richard P. Gunawardane and Christopher R. Arumainayagam Department of Chemistry, Wellesley College, Wellesley, MA 02481, INTRODUCTION AUGER ELECTRON SPECTROSCOPY (AES) is a nondestructive core-level ELECTRON SPECTROSCOPY for semi-quantitative determination of the elemental composition of surfaces, thin films, and interfaces. The popularity of this ultrahigh vacuum technique may be attributed to high surface sensitivity (an analysis depth of less than 100 ) and a relatively low detection limit (~ atomic percent).

When a beam of electrons, typically with an energy range of 3 20 keV, strikes a solid atom, a core-level ... Auger depth profiling with noble gas ion sputtering was alkali atoms into doublets, is due to spin-orbit coupling, the interaction of the spin magnetic moment with the magnetic field arising from the orbital angular momentum.

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