Transcription of CHAPTER 10 AUGER ELECTRON SPECTROSCOPY
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CHAPTER 10 AUGER ELECTRON SPECTROSCOPY
CHAPTER 10 AUGER ELECTRON SPECTROSCOPY Richard P. Gunawardane and Christopher R. Arumainayagam Department of Chemistry, Wellesley College, Wellesley, MA 02481, INTRODUCTION AUGER ELECTRON SPECTROSCOPY (AES) is a nondestructive core-level ELECTRON SPECTROSCOPY for semi-quantitative determination of the elemental composition of surfaces, thin films, and interfaces. The popularity of this ultrahigh vacuum technique may be attributed to high surface sensitivity (an analysis depth of less than 100 ) and a relatively low detection limit (~ atomic percent). In addition to having an elemental coverage from lithium to uranium and beyond, AES has the ability to distinguish between two elements that are close to each other in the periodic table. In addition, AES has an atomic number-dependent sensitivity that varies at most by one order of magnitude.
10.1 Introduction kinetic energy. The derivative form of the Auger spectrum enhances the Auger peaks and suppresses the background arising from the secondary and backscattered electrons. Figure 10.1 Schematic diagram showing the various locations and outcomes of electron-solid interactions (a composite diagram based on various sources) [8, 9].
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