Transcription of Cleanroom Considerations for ESD Control - SEMI
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Cleanroom Considerations for ESD Control - SEMI
Cleanroom Considerations for ESD Control Christopher W. Long IBM. 2007 SEMI NA ESD Workshop Agenda z Cleanroom /Environment Static Charge Challenges z Control Strategies z Case Studies z Summary and Acknowledgements Static Charge Problems: Contamination and ESD. Static Charge +. Static Charge + --- --- -- --- + +. +. --- --- + --- Yield Throughput Pellicles Wafers Equipment Equipment Surfaces Integrated Circuits Reticles Contamination ESD Damage Process Interruptions Clean Environments and Static Charge z Clearly many industries require Clean Manufacturing . z But with Clean Manufacturing also comes: Lowered Humidity Levels Process-Required Insulators Ultra-Clean Surfaces Processes which involve product movement Lack of naturally occurring ions z All of which can be contributors to elevated static charge levels in and around product Static Charge and Humidity Electrostatic Voltage Levels Generated by Produiction Personnel 40000. 10-20% RH. 65-90% RH. 30000. Voltage Level 20000. 10000.
Cleanroom Considerations for ESD Control Christopher W. Long IBM 2007 SEMI NA ESD Workshop
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