Cleanroom Considerations for ESD Control - SEMI

Cleanroom Considerations for ESD Control Christopher W. Long IBM. 2007 SEMI NA ESD Workshop Agenda z Cleanroom /Environment Static Charge Challenges z Control Strategies z Case Studies z Summary and Acknowledgements Static Charge Problems: Contamination and ESD. Static Charge +. Static Charge + --- --- -- --- + +. +. --- --- + --- Yield Throughput Pellicles Wafers Equipment Equipment Surfaces Integrated Circuits Reticles Contamination ESD Damage Process Interruptions Clean Environments and Static Charge z Clearly many industries require Clean Manufacturing.

Types of Commercially Available Ionizers zRadioactive - ionizing alpha particles ªPo210 alpha particles which collide with air molecules and ionize them. zAC Corona Discharge ªApplies 50/60 Hz AC HV to a grid of emitter points. zDC Corona Discharge ªDC of both polarities is fed to discrete emitters

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  Control, Considerations, Corona, Cleanroom, Cleanroom considerations for esd control

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