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CMOS Technology and Logic Gates - MIT OpenCourseWare

LCMOS Technology and Logic Gates poly Only 15,432,758 moremeta pdiff ndiff mosfets to Spring 2005 2/07/2005 L03 cmos Technology 1 Quality of Design Quality of a hardware design primarily judged by: Price Performance Power and/or Energy Other important metrics can include: Operating range Temperature, voltage, background radiation Reliability Mean-time between failures (MTBF) Form factor Size, weight Flexibility Tolerance to changes in specification Need to understand implementation Technology to understand tradeoffs among these attributes. Spring 2005 2/07/2005 L03 cmos Technology 2 System-Level Impacts Chips do not exist in a vacuum, ,2 cell phone contains: RISC Application Processor (ARM) Digital Signal Processor SRAM/DRAM Chips Flash Memory Chips Image removed due to copyright restrictions.

Wet Etching ETCHING Isotropic Anisotropic UV Light Photomask SiO SiO SiO SiO Photoresist SiO Dry Etching 6.884 – Spring 2005 Figure by MIT OCW. 2/07/2005 L03 – CMOS Technology 9 . FET = Field-Effect Transistor The four terminals of a fet (gate, source, drain and bulk)

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