Transcription of Dechuck Operation of Coulomb Type and Johnsen …
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Dechuck Operation of Coulomb Type and Johnsen …
Plasma and Fusion Research: LettersVolume 3, 051 (2008) Dechuck Operation of Coulomb Type and Johnsen - rahbek Type ofElectrostatic Chuck Used in Plasma ProcessingGyu Il SHIM and Hideo SUGAI1)Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan1)Department of Electronics and Information Engineering, Chubu University, Kasugai 487-8501, Japan(Received 17 June 2008/Accepted 24 July 2008)Comparative study on Coulomb type and Johnsen - rahbek type of electrostatic chuck used for holding asilicon wafer in plasma processing is presented.
Plasma and Fusion Research: Letters Volume 3, 051 (2008) Dechuck Operation of Coulomb Type and Johnsen-Rahbek Type of Electrostatic Chuck …
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