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Dry Etching (1)

Dry Etching Definition Etching : A process of removing material from substrate or film s surface Anisotropic: An etch profile that has a straight vertical wall Isotropic: An etch profile that has a curve wall Critical Dimension (CD): Using the current technology, the smallest possible geometric structure (width of the interconnected line, contacts, trenches, etc.) that can be form. ( +dimension%2C+CD) Plasma: The fourth state of matter generated with high heat or sending in a high electrical voltage into gas.

Plasma: The fourth state of matter generated with high heat or sending in a high electrical voltage into gas. Selectivity: The different in in etch rate between the etch surface and the resist or the layer ... creating volatile product which is then removed. The result is an etch surface. § Chemical/Physical etching or reactive ion etching (RIE)

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