Transcription of Efficient Flow Control and Filtration in CMP Slurry ...
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Efficient Flow Control and Filtration in CMP Slurry ...
PurifyprotecttransportENTEGRIS PROPRIETARY AND CONFIDENTIALE fficient Flow Control and Filtration in CMP Slurry DistributionRakesh K. Singh, , Microcontamination ControlEntegris, / Page 2 Levitronix CMP Users Conference 2/15/2007 Overview Motivation and Objectives CMP Slurry Point-of-Use (POU) Dispense Slurry Flow Control and Liquid Flowmeters Equipment, Test Cases and Procedure Experimental Data Silica Slurry Handling and Filter retention Filter Pressure Drop and Flow Rate Slurry Dispense Flow Consistency Summary and ConclusionsCONFIDENTIAL / Page 3 Levitronix CMP Users Conference 2/15/2007 MotivationCMP process and consumables must improve for future IC devices Smaller feature devices require more uniform and Efficient global and local wafer planarization, lower defectivity, h
purify protect transport ENTEGRIS PROPRIETARY AND CONFIDENTIAL Efficient Flow Control and Filtration in CMP Slurry Distribution Rakesh K. Singh, Ph.D., P.E.
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