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Etch rates for micromachining processing-part II ...

Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. This material is JOURNAL. presented OF. to ensure timely dissemination of scholarly MICROELECTROMECHANICAL SYSTEMS, and technical VOL. 12, Copyright2003. 6, DECEMBER and all rights therein are retained by authors or by other copyright holders.

Etch Rates for Micromachining Processing—Part II Kirt R. Williams, Senior Member, IEEE, Kishan Gupta, Student Member, IEEE, and Matthew Wasilik Abstract—Samples of 53 materials that are used or potentially can be used or in the fabrication of microelectromechanical systems and integrated circuits were prepared: single-crystal

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