Etch rates for micromachining processing-part II ...

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K. Gupta was with with Agilent Laboratories, Agilent Technologies, Palo Alto, CA 94303 USA. He is now at 804 Gregory Ct., Fremont, CA 94359 USA (e-mail: kishang@ieee.org). M. Wasilik is with the Berkeley Sensor & Actuator Center, University of Cal-ifornia at Berkeley, Berkeley, CA 94720-1770 USA. Digital Object Identifier 10.1109/JMEMS.2003.820936

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