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Fabrication Technology - Columbia University

Fabrication Technology By Department of Electronics and Communication Ghousia College of Engineering, Ramanagaram 1. OUTLINE. Introduction Why silicon The purity of silicon Czochralski growing process Fabrication processes Thermal Oxidation Etching techniques Diffusion 2. Expressions for diffusion of dopant, concentration Ion implantation Photomask generation Photolithography epitaxial growth Metallization and interconnections, Ohmic contacts planar PN junction diode Fabrication , Fabrication of resistors and capacitors in IC's. 3. INTRODUCTION. The microminiaturization of electronics circuits and systems and then concomitant application to computers and communications represent major innovations of the twentieth century. These have led to the introduction of new applications that were not possible with discrete devices. Integrated circuits on a single silicon wafer followed by the increase of the size of the wafer to accommodate many more such circuits served to significantly reduce the costs while increasing the reliability of these circuits.

Epitaxial growth Metallization and interconnections, Ohmic contacts Planar PN junction diode fabrication, Fabrication of resistors and capacitors in IC's. 4. INTRODUCTION. ¾The microminiaturization of electronics circuits and ... Silicon is found in abundance in nature as an oxide in sand and quartz.

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  Technology, Silicon, Epitaxial, Fabrication, Planar, Fabrication technology

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