Transcription of Four Point Probe I-V Electrical Measurements …
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Four Point Probe I-V Electrical Measurements …
Z Y V E X A P P L I C AT I O N N O T E 9 7 0 2. Four Point Probe I-V Electrical Measurements using the zyvex Test System Employing a Keithley 4200. Jeff Hochberg and Phil Foster, zyvex Corporation Introduction Iforce It is difficult to electrically characterize very small circuit elements in current-generation semiconductors. Most modern prober systems have unacceptably large metal pad requirements R1. in order to effect such Measurements , and unwieldy manual V. Rdut mechanical Probe stations with optical microscopes cannot Vsense resolve fine features. With standard gate dimensions of less than 90 nm and space budgets shrinking continuously, the smallest Probe pad dimensions required for most prober systems remain fixed at about 50 microns.
Four Point Probe I-V Electrical Measurements Using the Zyvex Test System Employing a Keithley 4200 Jeff Hochberg and Phil Foster, Zyvex Corporation
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