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Fundamentals of Semiconductor Manufacturing and Process ...

Fundamentals OFSEMICONDUCTORMANUFACTURING ANDPROCESS CONTROLFUNDAMENTALS OFSEMICONDUCTORMANUFACTURING ANDPROCESS CONTROLGary S. May, Institute of TechnologyAtlanta, GeorgiaCostas J. Spanos, of California at BerkeleyBerkeley, CaliforniaA JOHN WILEY & SONS, INC., PUBLICATIONC opyright 2006 by John Wiley & Sons, Inc. All rights reservedPublished by John Wiley & Sons, Inc., Hoboken, New JerseyPublished simultaneously in part of this publication may be reproduced, stored in a retrieval system, or transmitted in anyform or by any means, electronic, mechanical, photocopying, recording, scanning, or otherwise,except as permitted under Section 107 or 108 ofthe 1976 United States Copyright Act, withouteither the prior written permission of the Publisher, or authorization through payment of theappropriate per-copy fee to the Copyright Clearance Center, Inc.

5.7. Process Introduction and Time-to-Yield / 174 Summary / 176 Problems / 177 References / 180 6 Statistical Process Control 181 Objectives / 181 Introduction / 181 6.1. Control Chart Basics / 182 6.2. Patterns in Control Charts / 184 6.3. Control Charts for Attributes / 186 6.3.1. Control Chart for Fraction Nonconforming / 187 6.3.1.1. Chart ...

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