Transcription of High and Ultra High Vacuum Systems - …
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High and Ultra High Vacuum Systems - …
high and Ultra high Vacuum SystemsPresented by: Chad Folkman & Scott RutherfordOverviewzHigh VacuumzConcernszPumps zQuick SolutionszUltra high VacuumzConcerns zGas BehaviorzCleaning and HandlingzPump AdjustmentszGaugeszExercisesHigh Vacuum SystemszPressure range z10-6to 10-8torrzApplicationszElectronic Devices zDepositions (sputtering, evaporation, pulsed laser)zPlasma EtchingzIon ImplantationszNon-surface material characterization (EDS, SEM, ) high Vacuum SystemszPumping Options zDiffusion zTurbomolecularzIonzCryogeninczMajor ConcernszOutgassing (major concern water contamination)zSmall leakszHow can we solve these problems???zCombine and optimize various portions of the classzChoose pump to meet desired needszHe leak detectionzMinimize outgassingCold Traps Prevents back streaming of oil from diffusion pump when cold traps run out of liquid nitrogen, with no loss in conductance.
High and Ultra High Vacuum Systems Presented by: Chad Folkman & Scott Rutherford
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