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HIGH PERFORMANCE CLEANROOMS

HIGH PERFORMANCECLEANROOMSA Design Guidelines SourcebookJanuary 2006 TABLE OF Air Change Demand Controlled Dual Temperature Chilled Water Exhaust Fan-Filter Low Pressure Drop Air recirculation Air System Vacuum Pump Waterside Free design is a challenging field dominated by the need for high reliability,maintenance of strict space cleanliness requirements, life safety, and narrow temperature and humidity control bands. By necessity, efficiency is a lower priority in design. But there are a number of design approaches that have been shown to meet all the requirements of acleanroom facility robustly while minimizing power consumption and cost.

Recirculation air change rates (ACRs) are an important factor in contamination control in a cleanroom and are the single largest factor in determining fan and motor sizing for a recirculation air handling system. Air handler sizing and air path design directly impacts the capital costs and configuration of a building.

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  Sizing, Recirculation

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