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HIGH PERFORMANCE CLEANROOMS

HIGH PERFORMANCECLEANROOMSA Design Guidelines SourcebookJanuary 2006 TABLE OF Air Change Demand Controlled Dual Temperature Chilled Water Exhaust Fan-Filter Low Pressure Drop Air Recirculation Air System Vacuum Pump Waterside Free design is a challenging field dominated by the need for high reliability,maintenance of strict space cleanliness requirements, life safety, and narrow temperature and humidity control bands. By necessity, efficiency is a lower priority in design. But there are a number of design approaches that have been shown to meet all the requirements of acleanroom facility robustly while minimizing power consumption and cost. The CleanroomDesign Guidelines describe a number of successful and efficient design practices specificallyappropriate for cleanroom on actual measurement of operating cleanroom facilities and input from cleanroomdesigners, owners and operators, the Cleanroom Design Guidelines offer many successfuldesign approaches that apply to most cleanroom facilities .

velocity, such facilities will decrease particle deposition and maintain air uni-directionality.” Other success has been noted by cleanroom operators at Sandia National Laboratories (Albuquerque, N.M.). Sandia National Laboratories has successfully reduced air change rates in their state-of-the-art ISO Class 4 and 5 cleanrooms.

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