Transcription of HIGH PERFORMANCE CLEANROOMS - Lawrence Berkeley …
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HIGH PERFORMANCE CLEANROOMS - Lawrence Berkeley …
HIGH PERFORMANCECLEANROOMSA Design Guidelines SourcebookJanuary 2006 TABLE OF Air Change Demand Controlled Dual Temperature Chilled Water Exhaust Fan-Filter Low Pressure Drop Air Recirculation Air System Vacuum Pump Waterside Free design is a challenging field dominated by the need for high reliability,maintenance of strict space cleanliness requirements, life safety, and narrow temperature and humidity control bands. By necessity, efficiency is a lower priority in design. But there are a number of design approaches that have been shown to meet all the requirements of acleanroom facility robustly while minimizing power consumption and cost.
capital costs and configuration of a building. ... In most cleanrooms, human occupants are the primary source of contamination. Once a cleanroom is vacated, lower air changes per hour to maintain cleanliness are possible ... The data from the cleanroom energy benchmarking study4 conducted by Lawrence Berkeley
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