Transcription of High Performance Elastomer FKM O-Ring: SPOQ …
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High Performance Elastomer FKM O-Ring: SPOQ …
high Performance Elastomer FKM O- ring : SPOQ armor 1/2. VALQUA. Semiconductor Industry Semiconductor Products Industry Products SPOQ armor . high Performance Elastomer FKM O- ring Product & Benefits SPOQ armor is a high Performance FKM. material recommended for static/dynamic locations. Its plasma resistance properties make the SPOQ armor suited for CVD, Etch and Ashing applications. Featured Benefits Typical Properties - Plasma Resistance Color White - Low Adhesion Hardness (Shore A) 71. - Low Metallic Impurities Tensile Strength (MPa) 14. - Low Outgassing Elongation (%) 240. Modulus 100% Elongation (MPa) Maximum Temperature ( C) 200. Compression Set (%) 18.
Semiconductor Industry Products High Performance Elastomer FKM O-Ring: SPOQ ARMOR ® 1/2 SPOQ ARMOR ®. High Performance Elastomer FKM O-Ring - Plasma Resistance White
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