High Performance Mass Flow Controller - Horiba
780 – 3100 — — 5 – 9 9 – 17 ... SEC-Z52_X series N2 Ar H2 SF6 HBr WF6 Gas type Minimum flow rate — maximum flow rate Unit : SCCM 5. Configuration software that allows the user to alter specifications on-site The SEC-Z500X offers multi-gas, multi-range functionality, thanks to its configuration software. This software makes it ...
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