Transcription of http://www.agsemiconductor.com/files/M4DRT174.pdf
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http://www.agsemiconductor.com/files/M4DRT174.pdf
AG Semiconductor Services 1 EQUIPMENT DATASHEET Tool ID M4 DRT174 OEM/Model MATTSON AST Steag 2800 Serial Number 2002050853 Process RTP Vintage May, 2002 Wafer Size 200 mm MATTSON AST Steag 2800 AG Semiconductor Services 2 EQUIPMENT DATASHEET AG Semiconductor Services 3 EQUIPMENT DATASHEET AG Semiconductor Services 4 EQUIPMENT DATASHEET AG Semiconductor Services 5 EQUIPMENT DATASHEET AG
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