Transcription of Introduction to VLSI Fabrication Technologies
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Introduction to VLSI Fabrication Technologies
IntroductiontoVLSI FabricationTechnologies27/09/2005 EmanueleBaravelli2 Organization MaterialsUsedin VLSI Fabrication VLSI FabricationTechnologies Overviewof FabricationMethods Devicesimulation3 MainCategoriesof MaterialsMaterialscan beclassifiedintothreemaingroupsregarding theirelectricalconductionproperties: Insulators Conductors Semiconductors4 ConductorsConductorsare usedin IC design forelectricalconnectivity. The followingare goodconductingelements: Silver Gold Copper aluminum Platinum5 InsulatorsInsulatorsare usedtoisolate devicesand Capacitorsrelyon choiceof the insulators(and the conductors)in IC design dependsheavilyon howthe materialsinteractwitheachother, especiallywiththe The basic semiconductor material usedin devicefabricationisSilicon The success of thismaterial isdue
Aluminum Platinum. 5 ... MOS devices and Capacitors rely on an insulator for their physical operation. The choice of the insulators (and the conductors) in IC design depends heavily on how the materials interact with each other, especially with the ... Annealing Silicon deposition
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