Transcription of 潔淨室標準（ISO 14644-1:2015
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潔淨室標準（ISO 14644-1:2015
ISO 14644 -1:2015 iso14644 -1 1999 2015 12 16 ISO 14644 -1:2015 ISO 14644 -1:2015 ( /m3) /m3 m1 m5 mClass 110 Class 21002410 Class 3 Class 11,00023710235 Class 4 Class 1010,0002,3701,02035283 Class 5 Class 100100,00023,70010,2003,520832 Class 6 Class 1,000 1,000,000237,000102,00035,2008,320293 Class 7 Class 10,000352,00083,2002,930 Class 8 Class 100,0003,520,000832,00029,300 Class 935,200,000 8,320,000293,000 95%UCL Table TSI 0910932133 TSI Toson Technology Co., Ltd. E-Mail (03)667-6443 FAX (03)667-6453 0910932133 Table (m2) (NL)214263841052462873283695210561164126 8137214761510416108171161814819156201922 12322227623352244362563626100027>1000NL= 27 x ( /1000)(TSI inc.)
目前， ISO 14644-1:2015 已成為世界上唯一評估潔淨室等級的國際標準。 主要修正內容 低濃度微粒子數上限濃度的廢除 ISO 14644-1:2015 潔淨度等級之上限濃度(個/m3) 潔淨度等級 上限濃度（個/m3） ISO14644-1 Fed.Std-209E 0.1μm 0.2μm 0.3μm 0.5μm 1μm 5μm Class1 10 廢除 …
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