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Material Safety Data Sheet for Silane (SiH

Silane MSDSM aterial Safety Data Sheet for Silane (SiH4)Reference: Voltaix, Inc. MSDS Document Number - Si000 (revision dated 19 Dec 00) IN AN EMERGENCY, CALL CHEMTREC at 800-424-9300 (US toll free) or 703-527-3887 Contents: 1. Chemical Product and Company Identification2. Composition / Information on Ingredients3. Hazards Identification4. First Aid Measures5. Fire Fighting Measures6. Accidental Release Measures7. Handling and Storage8. Exposure Control / Personal Protection9. Physical and Chemical Properties10. Stability and Reactivity11. Toxicological Information12. Ecological Information13. Disposal Considerations14. Transport Information15. Regulatory Information16. Other InformationSection 1: Chemical Product and Company Identification (return to contents) (1 of 12) [6/4/02 2:18:23 PM] Silane MSDSM aterial Name:SilaneChemical Formula:SiH4 Synonyms:Monosilane, silicane, silicon hydride, silicon :Voltaix, Inc.

Silane MSDS Material Safety Data Sheet for Silane (SiH4) Reference: Voltaix, Inc. MSDS Document Number - Si000 (revision dated 19 Dec 00) IN AN EMERGENCY, CALL CHEMTREC at 800-424-9300 (US toll free) or 703-527-3887 Contents: 1. Chemical Product and Company Identification 2. Composition / Information on Ingredients 3. Hazards Identification 4.

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Material Safety Data Sheet for Argon (Ar)

www-s.mechse.uiuc.edu

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Material Safety Data Sheet for Hydrogen (H

www-s.mechse.uiuc.edu

2) Unless otherwise specified, properties are reported at 0oC (32oF) and 1 atmosphere (1.0 bar, 14.7 psia). Property Hydrogen Appearance colorless Odor none Physical state gas PH N/A Vapor Pressure N/A Vapor Density 0.082 g/L Boiling point -252.9 deg. C (-423 deg. F) Melting point N/A Solubility in water (v/v, at 20 deg C) 0.0182 Specific ...

Material Safety Data Sheet for Helium (He)

www-s.mechse.uiuc.edu

Reference: Voltaix, Inc. MSDS Document Number-He000 (revision dated 03 Sept 96) IN AN EMERGENCY, CALL CHEMTREC at 800-424-9300 (US toll free) or 703-527-3887 Contents: 1. Chemical Product and Company Identification 2. Composition / Information on Ingredients 3. Hazards Identification 4. First Aid Measures 5. Fire Fighting Measures 6.

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Material Safety Data Sheet for Nitrogen (N

www-s.mechse.uiuc.edu

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CVD Reactor Notes • The kinetics of your reaction mostly ... Safety • The precursors and by-products in CVD processes are mostly toxic, pyrophoric, corrosive and flammable. • Silane can ignite upon contact with air and can explode in areas with stagnant air. Therefore silane cylinders are generally stored outside the building in concrete ...

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