Transcription of Micro Mirror SLM - Swissphotonics
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Micro Mirror SLM - Swissphotonics
Fraunhofer IPMS Micro Mirror SLM Michael Wagner Fraunhofer Institute for Photonic Microsystems (IPMS) Maria-Reiche-Str. 2 01109 Dresden (Germany) Workshop Spatial Light Modulators SLM Technologies and Applications 27. October 2017 Fraunhofer IPMS Michael Wagner I 2017-10-27 I slide 2 Outline Introduction Fraunhofer Gesellschaft / Fraunhofer IPMS Micro Mirror Arrays Overview Device architecture Operation characteristics Applications in Optical Pattern Generation Laser mask writing for optical Micro lithography Laser Direct Imaging (LDI) Laser Marking/Engraving Applications in Optical Imaging and Wavefront Control Microscopy Adaptive Optics Summary Fraunhofer IPMS Michael Wagner I 2017-10-27 I slide 3 Outline Introduction Fraunhofer Gesellschaft / Fraunhofer IPMS Micro Mirror Arrays Overview Device architecture Operation characteristics Applications in Optical Pattern Generation Laser mask writing for optical Micro lithography
© Fraunhofer IPMS Micro Mirror SLM Michael Wagner Fraunhofer Institute for Photonic Microsystems (IPMS) Maria-Reiche-Str. 2 01109 Dresden (Germany)
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