Transcription of MKS G-Series Mass Flow Controllers Instruction Manual
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MKS G-Series Mass Flow Controllers Instruction Manual
1046210-001, Rev A. January, 2013. MKS G-Series Digital mass Flow Controllers Instruction Manual WARRANTY. G-Series mass Flow Controllers MKS Instruments, Inc. (MKS) warrants that for one (1) year from the date of shipment the equipment described above (the equipment ) manufactured by MKS shall be free from defects in materials and workmanship. For the period commencing with the date of shipment of this equipment and ending one (1) year later, MKS. will, at its option, either repair or replace any part which is defective in materials or workmanship without charge to the purchaser.
Standard for Mass Flow Controller and Mass Flow Meter Linearity [10] SEMI E28-00-0092. Guideline for Pressure Specifications of the Mass Flow Controller [11] SEMI E56-00-1296. Test Method for Determining Accuracy, Linearity, Repeatability, Short Term
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