Transcription of 一) PECVD 使用手冊 - ndl.narl.org.tw
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Example: dental hygienist
一) PECVD 使用手冊 - ndl.narl.org.tw
( ) PECVD A (1) (2) (3) (4) : (5) : (6607) (6625) B (1) ( ) (2) pump ( pump ) (3) Locoal Scrubber ( ) (4) C (1) PC2000 ( user) (2) Load Lock (3) Load Lock [Vent] wafer ( 6 ) (4) Load Lock [Evacuate] ( load lock pump valve ) (5) Process [Recipe] [Automatic] [manual] [clean] (6)
此部PECVD 可沈積SiO2,Si3N4,非晶-Si,氮氧化矽。
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