Transcription of PFA脱気モジュールMF500 - yokohamarika.com
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PFA脱気モジュールMF500 - yokohamarika.com
PFA MF500 91205100 90 Torr 12kPa abs 10 C 80 90 100 90 Torr 25 C 8ppm MF500(PFA Good 67 8 9 10 a 25 C 5060 70 80 90 100 90 Torr 25 C 8ppm MF500(PFA Good PTFE 3 4 5 6 7 8 9 10 kPa PTFE 25 C 30 40 50 60 70 80 90 100 90 Torr 25 C 8ppm MF500(PFA Good PTFE 0 1 2 3 4 5 6 7 8 9 10 kPa PTFEMF500(PFA 25 C Good 30 40 50 60 70 80 90 100 0 50 100 150 200 250 300 350 90 Torr 25 C 8ppm mL/min MF500(PFA Good PTFE PFA PTFE , 0 1 2 3 4 5 6 7 8 9 10 0 50 100 150 200 250 300 350 kPa PTFEMF500(PFA 25 C Good mL/min PTFE 30 40 50 60 70 80 90 100 0 50 100 150 200 250 300 350 90 Torr 25 C 8ppm))))))
PFA脱気モジュールMF500 資料 91205 100 真空度90Torr（12kPaabs） 脱気性能 10 ⽔温 ℃ 圧⼒損失 80 90 真空度90Torr（12kPa.abs） ⽔温25℃ 8ppm
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