Transcription of PHOTOLITHOGRAPHY OVERVIEW FOR MICROSYSTEMS
{{id}} {{{paragraph}}}
PHOTOLITHOGRAPHY OVERVIEW FOR MICROSYSTEMSP hotolithography OVERVIEW Learning ModulePatterned Mask forPhotolithography Expose2 PHOTOLITHOGRAPHY and MEMSvMicrosystems (MEMS) fabrication uses several layers to build devices. vEach layer of this linkage system is a different component of the device and requires a different defines and transfers a pattern to each respective layer. MEMS Linkage Assembly[Linkage graphic courtesy of KhalilNajafi, University of Michigan]3 PhotolithographyEach layer within a microsystemhas a unique pattern. vPhotolithography transfers this pattern from a mask to a photosensitive layer.
Jul 10, 2012 · Foundation Advanced Technology Education program, Department of Undergraduate Education grants. Acknowledgements Revision 07/10/12. Title: Photolithography Powerpoint Author: Jaimie Iuranich Created Date:
Domain:
Source:
Link to this page:
Please notify us if you found a problem with this document:
{{id}} {{{paragraph}}}