Transcription of PHOTOLITHOGRAPHY OVERVIEW FOR MICROSYSTEMS
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PHOTOLITHOGRAPHY OVERVIEW FOR MICROSYSTEMS
PHOTOLITHOGRAPHY OVERVIEW FOR MICROSYSTEMSP hotolithography OVERVIEW Learning ModulePatterned Mask forPhotolithography Expose2 PHOTOLITHOGRAPHY and MEMSvMicrosystems (MEMS) fabrication uses several layers to build devices. vEach layer of this linkage system is a different component of the device and requires a different defines and transfers a pattern to each respective layer. MEMS Linkage Assembly[Linkage graphic courtesy of KhalilNajafi, University of Michigan]3 PhotolithographyEach layer within a microsystemhas a unique pattern. vPhotolithography transfers this pattern from a mask to a photosensitive layer.
Jul 10, 2012 · Photolithography Overview Learning Module Patterned Mask for Photolithography Expose. 2 Photolithography and MEMS v Microsystems (MEMS) fabrication uses several ... properly and within specifications to the previous layers and subsequent layers. Microscopic Hinge [Photo courtesy of Sandia National Laboratories] 11 Mask vs. Reticle
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