Transcription of Plasma Sources Sci. Technol. 9 Introduction to gas …
{{id}} {{{paragraph}}}
Example: bachelor of science
Plasma Sources Sci. Technol. 9 Introduction to gas …
Plasma Sources Sci. (2000) 517 527. Printed in the UKPII: S0963-0252(00)15592-6 Introduction to gas dischargesN St J BraithwaiteThe Open University, Oxford Research Unit, Foxcombe Hall, Boars Hill, Oxford OX1 5HR,UKReceived 1 December 1999, in final form 13 June is a tutorial article. An introductory discussion of direct current gasdischarges is presented. Beginning with basic ideas from kinetic theory, gas dischargeplasmas are described in terms of phenomena observed in the laboratory. Various models areintroduced to account for electrical breakdown, Plasma boundaries and the longitudinal andtransverse structure of IntroductionThis article is intended to set the scene for more detaileddiscussions about the physics of laboratory plasmas. Thereare many types of Plasma source such as those basedon discharges created by direct current (dc), capacitivelycoupled radiofrequency (rf) (RIE, PECVD), inductivelycoupled rf (ICP, TCP, Helicon) and microwaves (ECR,Surfatron).
Plasma Sources Sci. Technol. 9 (2000) 517–527. Printed in the UK PII: S0963-0252(00)15592-6 Introduction to gas discharges N St J Braithwaite The Open University, Oxford Research Unit, Foxcombe Hall, Boars Hill, Oxford OX1 5HR,
Loading..
Tags:
Information
Domain:
Source:
Link to this page:
Please notify us if you found a problem with this document:
Related search queries
Determination of Surface Temperature in, Plasma, HIGH FREQUENCY PORTABLE PLASMA, High frequency portable plasma generator unit, Surface treatment, Ceramic, Surface, Low Surface Energy, Fundamentals of Membranes for Water Treatment, Hardness, Plasma nitrided, A Technology Decision – Adhesive Lamination or