Transcription of Scanning Surface Inspection System with Defect …
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Scanning Surface Inspection System with Defect …
Scanning Surface Inspection System with Defect -review SEM and Analysis System Solutions 78 Scanning Surface Inspection System with Defect -reviewSEM and Analysis System SolutionsOVERVIEW: Data obtained from wafer- Surface Inspection tools are limitedto Defect maps, Defect number, etc. In any case, in order to swiftly executemeasures to decrease the amount of defects , it is very important to determinewhere the defects are being generated. Accordingly, more concreteinformation on defects , such as shape and constitution data, is becomingmore necessary. Hitachi High-Technologies Corporation is therefore offeringa line-up of wafer- Surface Defect Inspection tools and review scanningelectron microscopes, and Hitachi Kenki FineTech Co.
Scanning Surface Inspection System with Defect-review SEM and Analysis System Solutions 78 Scanning Surface Inspection System with Defect-review
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