Transcription of SCHOTT LITHOTEC ZERODUR - Mark Optics
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SCHOTT LITHOTEC ZERODUR - Mark Optics
Zero thermal expansion glass ceramicZERODUR ZERODUR SCHOTT LITHOTEC10152 e ba/kn/wo Printed in GermanySchott LITHOTEC ZERODUR For many years ZERODUR zero thermalexpansion material has provided for reliabledesigns in precision optical homogeneity of the material propertiesof ZERODUR enables opto-mechanicalengineering solutions with long-termmechanical and thermal stability. The easy-to-achieve optical figure and improvedmicroroughness have contributed to thesuccess of this is widely used as a mirrorsubstrate material and for precision framesin current state-of-the-art structuring of the material allowssuperior stability of designs in ambitiousdynamic environments, such as stages inwafer steppers and its ability to match zero thermalexpansion very closely, ZERODUR isone of the prime material candidates forsubstrates in lithography applications atwavelengths around 13 nm (EUVL).
Schott Lithotec ZERODUR® For many years ZERODUR® zero thermal expansion material has provided for reliable designs in precision optical applications. The homogeneity of the material properties
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