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Semiconductor Inspection System for next - generation 216 Semiconductor Inspection System for next -generationOVERVIEW: The miniaturization of Semiconductor devices is acceleratingyear by year, as represented by the technical roadmap of ITRIS (InternationalTechnology Roadmap for semiconductors ). Along with this trend, theincreasing cost of Inspection tools and systems is becoming an issue. Basedon its know-how of how to optimize operations and support applications,Hitachi has developed an integrated Inspection and evaluation System witha high return on investment (ROI) as a UsamiSeiji IsogaiIsao KawataINTRODUCTIONTHE miniaturization of Semiconductor devices hasbeen accelerating and has reached the 130-nm with this miniaturization, efforts have beenmade to improve productivity.
Semiconductor Inspection System for Next-generation 218 inspection of system LSIs and logic LSIs, which need die-to-die comparison as a major part of their
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